000 00579nam a2200145Ia 4500
008 131008s9999 xx 000 0 und d
022 _a1369-8001
245 _aMaterials Science in Semiconductor Processing
260 _aAmsterdam, Netherlands
260 _bElsevier Science Direct
300 _aOn-campus e-Journal under Digital Library Program of Higher Education Commission (HEC) of Pakistan
650 _aMaterials Science in Semiconductor Processing
856 _3Click here to access the e-Journal
_uhttp://www.sciencedirect.com/science/journal/13698001
942 _cEJ
999 _c132381
_d132381